High temperature electrode-barriers for ferroelectric and other capacitor structures

Overview

Information

Number: 5790366
Application: 08/763011
Filing date: 12/06/1996
Issue date: 08/04/1998
Inventor(s): Seshu B. Desu, Hemanshu D. Bhatt, Dilip P. Vijay, Yoosang Hwang

US Classification: 257/295; 257/306; 257/E21.011; 361/305; 361/311; 361/313; 361/322

Citations

Ramtron International (2)

Number	Title	Issue Date
5005102	Multilayer electrodes for integrated circuit capacitors	1991/04/02
5142437	Conducting electrode layers for ferroelectric capacitors in integrated circuits and method	1992/08/25

FreeScale Semiconductor (1)

Number	Title	Issue Date
5185689	Capacitor having a ruthenate electrode and method of formation	1993/02/09

North Carolina State University (1)

Number	Title	Issue Date
5555486	Hybrid metal/metal oxide electrodes for ferroelectric capacitors	1996/09/10

texas Instruments (1)

Number	Title	Issue Date
5003428	Electrodes for ceramic oxide capacitors	1991/03/26

Abstract

Abstract

A capacitor for use on silicon or other substrate has a multilayer electrode structure. In a preferred embodiment, a bottom electrode situated on the substrate has a bottom layer of Pt--Rh--O.sub.x, an intermediate layer of Pt--Rh, and a top layer of Pt--Rh--O.sub.x. A ferroelectric material such as PZT (or other material) is situated on the bottom electrode. A top electrode, preferably of identical composition as the bottom electrode, is situated on the opposite side of the ferroelectric from the bottom electrode.

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Number	Title
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Referenced by

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6759250	Deposition method for lead germanate ferroelectric structure with multi-layered electrode	2004/07/06
6420740	Lead germanate ferroelectric structure with multi-layered electrode	2002/07/16
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LG Semicon Co. (2)

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Tech Analysis

Class	Subclass	Type	Reference Factor	Citation Factor	Strength	Grant time	Early grant (%)
257	295	Emerging	Average	Seminal	Medium High	Average	25.4
257	306	Emerging	Average	Seminal	Medium High	Average	25.2
257	E21.011	Emerging	Average	Seminal	Medium High	Average	29.7
361	305	Emerging	Average	Seminal	Medium High	Average	30.8
361	311	Emerging	Average	Seminal	Medium High	Average	31.0
361	313	Emerging	Average	Seminal	Medium High	Average	34.1
361	322	Emerging	Average	Seminal	Medium High	Average	29.9