Referenced by

Micron Technology (14)

Number	Title	Issue Date
6730559	Capacitors and methods of forming capacitors	2004/05/04
6400552	Capacitor with conductively doped Si-Ge alloy electrode	2002/06/04
6407452	Integrated circuitry and method of restricting diffusion from one material to another	2002/06/18
6495428	Method of making a capacitor with oxygenated metal electrodes and high dielectric constant materials	2002/12/17
6627508	Method of forming capacitors containing tantalum	2003/09/30
6646298	Capacitor with oxygenated metal electrodes and high dielectric constant materials	2003/11/11
6146959	Method of forming capacitors containing tantalum	2000/11/14
6773981	Methods of forming capacitors	2004/08/10
6891217	Capacitor with discrete dielectric material	2005/05/10
6995419	Semiconductor constructions having crystalline dielectric layers	2006/02/07
7166885	Semiconductor devices	2007/01/23
6156638	Integrated circuitry and method of restricting diffusion from one material to another	2000/12/05
6191443	Capacitors, methods of forming capacitors, and DRAM memory cells	2001/02/20
6255186	Methods of forming integrated circuitry and capacitors having a capacitor electrode having a base and a pair of walls projecting upwardly therefrom	2001/07/03

CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC. (8)

Number	Title	Issue Date
6916380	System for depositing a layered film	2005/07/12
6858536	Processes to form a metallic film stack	2005/02/22
7038263	Integrated circuits with rhodium-rich structures	2006/05/02
6781175	Rhodium-rich integrated circuit capacitor electrode	2004/08/24
6759705	Platinum-rhodium stack as an oxygen barrier in an integrated circuit capacitor	2004/07/06
6740554	Methods to form rhodium-rich oxygen barriers	2004/05/25
6524867	Method for forming platinum-rhodium stack as an oxygen barrier	2003/02/25
6518610	Rhodium-rich oxygen barriers	2003/02/11

SamSung Electronics Co. (6)

Number	Title	Issue Date
7745233	Ferroelectric capacitor and ferroelectric memory with Ir-Ru alloy electrode and method of manufacturing the same	2010/06/29
7459736	Ferroelectric capacitor and ferroelectric memory with Ir-Ru alloy electrode and method of manufacturing the same	2008/12/02
6075264	Structure of a ferroelectric memory cell and method of fabricating it	2000/06/13
6376325	Method for fabricating a ferroelectric device	2002/04/23
11424316	Capacitor structure and semiconductor device including the same	2022/08/23
6337216	Methods of forming ferroelectric memory cells	2002/01/08

Round Rock Research, (4)

Number	Title	Issue Date
6165834	Method of forming capacitors, method of processing dielectric layers, method of forming a DRAM cell	2000/12/26
6953721	Methods of forming a capacitor with an amorphous and a crystalline high K capacitor dielectric region	2005/10/11
7005695	Integrated circuitry including a capacitor with an amorphous and a crystalline high K capacitor dielectric region	2006/02/28
7446363	Capacitor including a percentage of amorphous dielectric material and a percentage of crystalline dielectric material	2008/11/04

Fujitsu (3)

Number	Title	Issue Date
6337238	Semiconductor device having a dielectric film and a fabrication process thereof	2002/01/08
8980647	Method of manufacturing semiconductor device	2015/03/17
9679904	Method of manufacturing semiconductor device	2017/06/13

Sharp (3)

Number	Title	Issue Date
6420740	Lead germanate ferroelectric structure with multi-layered electrode	2002/07/16
6759250	Deposition method for lead germanate ferroelectric structure with multi-layered electrode	2004/07/06
6190963	Composite iridium-metal-oxygen barrier structure with refractory metal companion barrier and method for same	2001/02/20

Sony (2)

Number	Title	Issue Date
6479849	Dielectric capacitor and memory and method of manufacturing the same	2002/11/12
6355492	Process for the manufacturing of oxide electrodes for ferroelectric capacitor	2002/03/12

Avago Technologies General IP PTE. (2)

Number	Title	Issue Date
6734477	Fabricating an embedded ferroelectric memory cell	2004/05/11
6709875	Contamination control for embedded ferroelectric device fabrication processes	2004/03/23

Entegris (2)

Number	Title	Issue Date
7750173	Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta205 thin films	2010/07/06
7858816	Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta.sub.20.sub.5 thin films	2010/12/28

Murata Manufacturing Co. (1)

Number	Title	Issue Date
6350644	Ferroelectric thin-film device and method for producing the same	2002/02/26

International Business Machines (1)

Number	Title	Issue Date
6339527	Thin film capacitor on ceramic	2002/01/15

NEC (1)

Number	Title	Issue Date
6333537	Thin film capacitor with an improved top electrode	2001/12/25

MARIANA HDD B.V. (1)

Number	Title	Issue Date
6460243	Method of making low stress and low resistance rhodium (RH) leads	2002/10/08

Advanced Technology Materials (1)

Number	Title	Issue Date
7012292	Oxidative top electrode deposition process, and microelectronic device structure	2006/03/14

GLOBALFOUNDRIES (1)

Number	Title	Issue Date
6188120	Method and materials for through-mask electroplating and selective base removal	2001/02/13

Hyundai Electronics Industries CO. (1)

Number	Title	Issue Date
6232133	Method for fabricating a capacitor of semiconductor memory device	2001/05/15

Nichia (1)

Number	Title	Issue Date
6921928	Nitride semiconductor element	2005/07/26

NANYA Technology (1)

Number	Title	Issue Date
6162744	Method of forming capacitors having high-K oxygen containing capacitor dielectric layers, method of processing high-K oxygen containing dielectric layers, method of forming a DRAM cell having having high-K oxygen containing capacitor dielectric layers	2000/12/19

Lapis Semiconductor (1)

Number	Title	Issue Date
6403441	Method for fabricating storage capacitor using high dielectric constant material	2002/06/11

Chartered Semiconductor Manufacturing (1)

Number	Title	Issue Date
6429088	Method of fabricating improved capacitors with pinhole repair consideration when oxide conductors are used	2002/08/06

Hitachi Global Storage Technologies Netherlands B.V. (1)

Number	Title	Issue Date
6460243	Method of making low stress and low resistance rhodium (RH) leads	2002/10/08